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  • Title: A class of low voltage, elastomer-metal 'wet' actuators for use in high-density microfluidics.
    Author: Bansal T, Chang MP, Maharbiz MM.
    Journal: Lab Chip; 2007 Feb; 7(2):164-6. PubMed ID: 17268616.
    Abstract:
    We report a class of 'wet' MEMS elastomer-metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.
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