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  • Title: Bond-detach lithography: a method for micro/nanolithography by precision PDMS patterning.
    Author: Thangawng AL, Swartz MA, Glucksberg MR, Ruoff RS.
    Journal: Small; 2007 Jan; 3(1):132-8. PubMed ID: 17294484.
    Abstract:
    We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.
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