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  • Title: Mixed amido/imido/guanidinato complexes of niobium: potential precursors for MOCVD of niobium nitride thin films.
    Author: Baunemann A, Bekermann D, Thiede TB, Parala H, Winter M, Gemel C, Fischer RA.
    Journal: Dalton Trans; 2008 Jul 28; (28):3715-22. PubMed ID: 18615218.
    Abstract:
    Novel mixed amido/imido/guanidinato complexes of niobium are reported. The complexes were synthesized by insertion of two equivalents of di-isopropylcarbodiimide (i-Pr-cdi) or bis-cyclohexylcarbodiimide (Cy-cdi) respectively, into the niobium-amido bonds of [Nb(NR(2))(3)(N-t-Bu)] (, R = Me; , R = Et) starting out from [NbCl(3)(N-t-Bu)(py)(2)] and the respective LiNR(2) reagent (py = pyridine). Four representative examples of these mixed ligand amido/imido/guanidinato compounds were synthesized and were characterized by (1)H-NMR, (13)C-NMR, (15)N-NMR, CHN-analysis, mass spectrometry and infra-red spectroscopy. The molecular structures of [Nb(NR(2)){eta(2)-(i-Pr-N)(2)C(NR(2))}(2)(N-t-Bu)] (, R = Me; , R = Et) in the solid state were determined by single-crystal X-ray diffraction studies and are discussed together with the molecular structure of the starting compound [Nb(NMe(2))(3)(N-t-Bu)] (). The thermal properties of the new compounds depend on the substitution at the guanidinato ligand. Complexes of i-Pr-cdi are significantly more volatile than complexes of Cy-cdi as revealed by thermogravimetric analysis. Preliminary experiments using as a single-molecule source for metal-organic chemical vapour deposition (MOCVD) in the absence of ammonia indicate the formation of the stoichiometric, and surprisingly carbon-free, cubic niobium nitride phase.
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