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  • Title: Nanocapacitive circuit elements.
    Author: Zareie HM, Morgan SW, Moghaddam M, Maaroof AI, Cortie MB, Phillips MR.
    Journal: ACS Nano; 2008 Aug; 2(8):1615-9. PubMed ID: 19206363.
    Abstract:
    "Natural" lithography was used to prepare arrays of nanoscale capacitors on silicon. The capacitance was verified by a novel technique based on the interaction of a charged substrate with the electron beam of a scanning electron microscope. The "nanocapacitors" possessed a capacitance of approximately 1 x 10(-16) F and were observed to hold charge for over an hour. Our results indicate that fabricating nanostructures using natural lithography may provide a viable alternative for future nanoelectronic devices.
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