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  • Title: The role of carrier gases in the production of metastable argon atoms in a rf discharge.
    Author: Rudinger K, Lu ZT, Mueller P.
    Journal: Rev Sci Instrum; 2009 Mar; 80(3):036105. PubMed ID: 19334960.
    Abstract:
    We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar(*)/Ar) of 2x10(-4) at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials.
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