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  • Title: Shrinking solid-state nanopores using electron-beam-induced deposition.
    Author: Kox R, Chen C, Maes G, Lagae L, Borghs G.
    Journal: Nanotechnology; 2009 Mar 18; 20(11):115302. PubMed ID: 19420436.
    Abstract:
    Solid-state nanopores of only a few nanometres in size show a great potential for applications such as molecule detection and DNA sequencing. In most cases, the fabrication of such a nanopore requires the high energy beam of a transmission electron microscope (TEM) or focused ion beam (FIB) tool to drill or reshape a small hole in a freestanding membrane. Here, we present a novel method to reduce the size of existing nanopores using electron-beam-induced deposition (EBID) of carbon in a conventional scanning electron microscope (SEM). The existing nanopores are etched in a silicon membrane using anisotropic wet etching and can be shrunk down to a few nanometres using EBID. This paper discusses the parameters that influence the rate of shrinking and provides an insight into the underlying mechanism.
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