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  • Title: High resolution interferometer with multiple-pass optical configuration.
    Author: Ahn J, Kim JA, Kang CS, Kim JW, Kim S.
    Journal: Opt Express; 2009 Nov 09; 17(23):21042-9. PubMed ID: 19997342.
    Abstract:
    An interferometer having fourteen times higher resolution than a conventional single-pass interferometer has been developed by making multiple-pass optical path. To embody the multiple-pass optical configuration, a two-dimensional corner cube array block was designed, and its symmetric structure minimized the measurement error. The effect from the alignment error and the imperfection of corner cube is calculated as picometer level. An experiment proves that the suggested interferometer has about 45 nm of optical resolution and its nonlinearity is about 0.5 nm in peak-to-valley.
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