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  • Title: Microlens performance limits in sub-2mum pixel CMOS image sensors.
    Author: Huo Y, Fesenmaier CC, Catrysse PB.
    Journal: Opt Express; 2010 Mar 15; 18(6):5861-72. PubMed ID: 20389603.
    Abstract:
    CMOS image sensors with smaller pixels are expected to enable digital imaging systems with better resolution. When pixel size scales below 2 mum, however, diffraction affects the optical performance of the pixel and its microlens, in particular. We present a first-principles electromagnetic analysis of microlens behavior during the lateral scaling of CMOS image sensor pixels. We establish for a three-metal-layer pixel that diffraction prevents the microlens from acting as a focusing element when pixels become smaller than 1.4 microm. This severely degrades performance for on and off-axis pixels in red, green and blue color channels. We predict that one-metal-layer or backside-illuminated pixels are required to extend the functionality of microlenses beyond the 1.4 microm pixel node.
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