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  • Title: Antireflective properties of porous Si nanocolumnar structures with graded refractive index layers.
    Author: Jang SJ, Song YM, Yu JS, Yeo CI, Lee YT.
    Journal: Opt Lett; 2011 Jan 15; 36(2):253-5. PubMed ID: 21263517.
    Abstract:
    We report on the antireflective characteristics of porous silicon (Si) nanocolumnar structures consisting of graded refractive index layers and carry out a rigorous coupled-wave analysis simulation. The refractive index of Si is gradually modified by a tilted angle electron beam evaporation method. For the fabricated Si nanostructure with a Gaussian index profile of 100 nm, reflectivity (R) of less than 7.5% is obtained with an average value of approximately 2.9% at the wavelength region of 400-800 nm. The experimental results are reasonably consistent with the simulated results for the design of antireflective Si nanostructures.
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