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  • Title: Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: protective capping of metallic iron structures.
    Author: Schirmer M, Walz MM, Papp C, Kronast F, Gray AX, Balke B, Cramm S, Fadley CS, Steinrück HP, Marbach H.
    Journal: Nanotechnology; 2011 Nov 25; 22(47):475304. PubMed ID: 22057093.
    Abstract:
    We report on the stepwise generation of layered nanostructures via electron beam induced deposition (EBID) using organometallic precursor molecules in ultra-high vacuum (UHV). In a first step a metallic iron line structure was produced using iron pentacarbonyl; in a second step this nanostructure was then locally capped with a 2-3 nm thin titanium oxide-containing film fabricated from titanium tetraisopropoxide. The chemical composition of the deposited layers was analyzed by spatially resolved Auger electron spectroscopy. With spatially resolved x-ray absorption spectroscopy at the Fe L₃ edge, it was demonstrated that the thin capping layer prevents the iron structure from oxidation upon exposure to air.
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