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  • Title: Cyclic block copolymers for controlling feature sizes in block copolymer lithography.
    Author: Poelma JE, Ono K, Miyajima D, Aida T, Satoh K, Hawker CJ.
    Journal: ACS Nano; 2012 Dec 21; 6(12):10845-54. PubMed ID: 23194415.
    Abstract:
    Block copolymer lithography holds promise as a next-generation technique to achieve the sub-20 nm feature sizes demanded by semiconductor roadmaps. While molecular weight and block immiscibility have traditionally been used to control feature size, this study demonstrates that macromolecular architecture is also a powerful tool for tuning domain spacing. To demonstrate this concept, a new synthetic strategy for cyclic block polymers based on highly efficient "click" coupling of difunctional linear chains is developed, and the thin film self-assembly of cyclic polystyrene-block-polyethylene oxide (cPS-b-PEO) is compared with the corresponding linear analogues. The reduced hydrodynamic radii of the cyclic systems result in ~30% decrease in domain spacing over the corresponding linear polymers.
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