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  • Title: Efficient perfectly vertical fiber-to-chip grating coupler for silicon horizontal multiple slot waveguides.
    Author: Covey J, Chen RT.
    Journal: Opt Express; 2013 May 06; 21(9):10886-96. PubMed ID: 23669945.
    Abstract:
    Horizontal multiple slot waveguides of polysilicon and silicon nanocrystalline oxide were grating coupled to a surface normal fiber array. Measurements yielded a coupling efficiency of 60% per grating. The fabrication-tolerant, four-stage grating design was genetically evolved from a random seed without starting from first-principle design. Theoretical coupling efficiency was 68% and was re-designed to 63% after accommodating all sources of fabrication error. To our knowledge, this is the first implementation of a purely polysilicon and silicon nanocrystalline oxide slot waveguide platform.
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