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  • Title: Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers.
    Author: Royo G, Sánchez-Azqueta C, Gimeno C, Aldea C, Celma S.
    Journal: Sensors (Basel); 2016 Dec 30; 17(1):. PubMed ID: 28042830.
    Abstract:
    In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/ Hz at 50 kHz, which corresponds to 100 μg/ Hz .
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