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  • Title: A Sub-mW 18-MHz MEMS Oscillator Based on a 98-dBΩ Adjustable Bandwidth Transimpedance Amplifier and a Lamé-Mode Resonator.
    Author: Bouchami A, Elsayed MY, Nabki F.
    Journal: Sensors (Basel); 2019 Jun 13; 19(12):. PubMed ID: 31200575.
    Abstract:
    This paper presents a microelectromechanical system (MEMS)-based oscillator based on a Lamé-mode capacitive micromachined resonator and a fully differential high-gain transimpedance amplifier (TIA). The proposed TIA is designed using TSMC 65 nm CMOS technology and consumes only 0.9 mA from a 1-V supply. The measured mid-band transimpedance gain is 98 dB Ω and the TIA features an adjustable bandwidth with a maximum bandwidth of 142 MHz for a parasitic capacitance C P of 4 pF. The measured input-referred current noise of the TIA at mid-band is below 15 pA/ Hz . The TIA is connected to a Lamé-mode resonator, and the oscillator performance in terms of phase noise and frequency stability is presented. The measured phase noise under vacuum is -120 dBc/Hz at a 1-kHz offset, while the phase noise floor reaches -127 dBc/Hz. The measured short-term stability of the MEMS-based oscillator is ±0.25 ppm.
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