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  • Title: Multi-Mode Love-Wave SAW Magnetic-Field Sensors.
    Author: Schmalz J, Kittmann A, Durdaut P, Spetzler B, Faupel F, Höft M, Quandt E, Gerken M.
    Journal: Sensors (Basel); 2020 Jun 17; 20(12):. PubMed ID: 32560492.
    Abstract:
    A surface-acoustic-wave (SAW) magnetic-field sensor utilizing fundamental, first- and second-order Love-wave modes is investigated. A 4.5   μ m SiO2 guiding layer on an ST-cut quartz substrate is coated with a 200 n m (Fe90Co10)78Si12B10 magnetostrictive layer in a delay-line configuration. Love-waves are excited and detected by two interdigital transducers (IDT). The delta-E effect in the magnetostrictive layer causes a phase change with applied magnetic field. A sensitivity of 1250 ° / m T is measured for the fundamental Love mode at 263 M Hz . For the first-order Love mode a value of 45 ° / m T is obtained at 352 M Hz . This result is compared to finite-element-method (FEM) simulations using one-dimensional (1D) and two-and-a-half-dimensional (2.5 D) models. The FEM simulations confirm the large drop in sensitivity as the first-order mode is close to cut-off. For multi-mode operation, we identify as a suitable geometry a guiding layer to wavelength ratio of h GL / λ ≈ 1.5 for an IDT pitch of p = 12   μ m . For this layer configuration, the first three modes are sufficiently far away from cut-off and show good sensitivity.
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