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  • Title: Real-time and non-destructive hydrocarbon gas sensing using mid-infrared integrated photonic circuits.
    Author: Jin T, Zhou J, Lin PT.
    Journal: RSC Adv; 2020; 10(13):7452-7459. PubMed ID: 33425327.
    Abstract:
    A chip-scale mid-infrared (mid-IR) sensor was developed for hydrocarbon gas detection. The sensor consisted of amorphous Si (a-Si) optical ridge waveguides that were fabricated by complementary metal-oxide-semiconductor (CMOS) processes. The waveguide exhibited a sharp fundamental mode through λ = 2.70 to 3.50 μm. Its sensing performance was characterized by measuring methane and acetylene. From the spectral mode attenuation, the characteristic C-H absorption bands associated with methane and acetylene were found at λ = 3.29-3.33 μm and λ = 3.00-3.06 μm, respectively. In addition, real-time methane and acetylene concentration monitoring was demonstrated at λ = 3.02 and 3.32 μm. Hence, the mid-IR waveguide sensor enabled an accurate and instantaneous analysis of hydrocarbon gas mixtures.
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