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  • Title: Mid-infrared ridge waveguides fabricated in CaF2 crystal by the technique of O5+ ion irradiation.
    Author: Zhang X, Cheng Y, Zhang Y.
    Journal: Appl Opt; 2021 Jul 20; 60(21):6302-6307. PubMed ID: 34613297.
    Abstract:
    The fabrication of ridge waveguides in calcium fluoride (CaF2) crystal working at the mid-infrared wavelength was studied. First, the planar waveguide was fabricated by using O5+ ion irradiation, and then the ridge waveguide structure was manufactured by precise diamond blade dicing. The propagation loss was measured by end-face coupling arrangement, and then annealing treatment was implemented to optimize the waveguide performance, and the propagation loss was finally reduced to 0.5 dB/cm. We measured the Raman spectra of the waveguide and substrate to observe the damage to the material lattice caused by O5+ ion irradiation technology.
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