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  • Title: Silicon-Organic Hybrid Electro-Optic Modulator and Microwave Photonics Signal Processing Applications.
    Author: Zhou Z, Chao M, Su X, Fu S, Liu R, Li Z, Bo S, Chen Z, Wu Z, Han X.
    Journal: Micromachines (Basel); 2023 Oct 25; 14(11):. PubMed ID: 38004834.
    Abstract:
    Electro-optic modulator (EOM) is one of the key devices of high-speed optical fiber communication systems and ultra-wideband microwave photonic systems. Silicon-organic hybrid (SOH) integration platform combines the advantages of silicon photonics and organic materials, providing a high electro-optic effect and compact structure for photonic integrated devices. In this paper, we present an SOH-integrated EOM with comprehensive investigation of EOM structure design, silicon waveguide fabrication with Slot structure, on-chip poling of organic electro-optic material, and characterization of EO modulation response. The SOH-integrated EOM is measured with 3 dB bandwidth of over 50 GHz and half-wave voltage length product of 0.26 V·cm. Furthermore, we demonstrate a microwave photonics phase shifter by using the fabricated SOH-integrated dual parallel Mach-Zehnder modulator. The phase shift range of 410° is completed from 8 GHz to 26 GHz with a power consumption of less than 38 mW.
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