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  • Title: Bidirectional electrostatic MEMS-tunable VCSELs.
    Author: Simonsen A, Payandeh M, Engelberth Hansen S, Marchevsky A, Cheol Park G, Kumar Sahoo H, Semenova E, Hansen O, Yvind K.
    Journal: Opt Lett; 2024 Feb 15; 49(4):802-805. PubMed ID: 38359186.
    Abstract:
    Microelectromechanical system (MEMS) vertical cavity surface-emitting lasers (VCSELs) are the fastest coherently tunable lasers (nm/ns) due to their unique Doppler-assisted tuning mechanism. However, in standard electrostatic actuation, the response is highly nonlinear and large (>100 V) dynamic voltages are needed for MHz sweep rates. We present a bidirectional MEMS VCSEL as a solution to these challenges where static voltages can be used to enable substantially linear and amplified wavelength tuning with respect to the fast tuning (MEMS) voltage. Using an InP/SOI MEMS bonded structure, we show a tuning range of 54.5 nm (gain limited) centered around 1586 nm at an actuation frequency of 2.73 MHz.
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