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4. Combination of e-beam lithography and of high velocity AIN/diamond-layered structure for SAW filters in X band. Kirsch P, Assouar MB, Elmazria O, Hakiki ME, Mortet V, Alnot P. IEEE Trans Ultrason Ferroelectr Freq Control; 2007 Jul; 54(7):1486-91. PubMed ID: 17718340 [Abstract] [Full Text] [Related]
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