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Pubmed for Handhelds

PUBMED FOR HANDHELDS

Journal Abstract Search

144 related items for PubMed ID: 26103045

  • 1. Atomic force microscope caliper for critical dimension measurements of micro and nanostructures through sidewall scanning.
    Xie H, Hussain D, Yang F, Sun L.
    Ultramicroscopy; 2015 Nov; 158():8-16. PubMed ID: 26103045
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  • 2. Atomic force microscopy deep trench and sidewall imaging with an optical fiber probe.
    Xie H, Hussain D, Yang F, Sun L.
    Rev Sci Instrum; 2014 Dec; 85(12):123704. PubMed ID: 25554298
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  • 8. Observation of Si pattern sidewall using inclination atomic force microscope for evaluation of line edge roughness.
    Hosaka S, Koyabu H, Noro M, Takizawa K, Sone H, Yin Y.
    J Nanosci Nanotechnol; 2010 Jul; 10(7):4522-7. PubMed ID: 21128451
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  • 9. Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit.
    Dixson RG, Orji NG, Goldband RS.
    J Micro Nanolithogr MEMS MOEMS; 2016 Jan 25; 15(1):. PubMed ID: 27087883
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  • 10. Tip characterization method using multi-feature characterizer for CD-AFM.
    Orji NG, Itoh H, Wang C, Dixson RG, Walecki PS, Schmidt SW, Irmer B.
    Ultramicroscopy; 2016 Mar 25; 162():25-34. PubMed ID: 26720439
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  • 11. Rapid measurement of a high step microstructure with 90° steep sidewall.
    Ju BF, Chen YL, Zhang W, Fang FZ.
    Rev Sci Instrum; 2012 Jan 25; 83(1):013706. PubMed ID: 22299961
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  • 12. High aspect ratio AFM Probe processing by helium-ion-beam induced deposition.
    Onishi K, Guo H, Nagano S, Fujita D.
    Microscopy (Oxf); 2014 Nov 25; 63 Suppl 1():i30. PubMed ID: 25359832
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