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Pubmed for Handhelds

PUBMED FOR HANDHELDS

Journal Abstract Search

372 related items for PubMed ID: 34577761

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  • 3. Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2.
    Nian L, Zou Y, Gao C, Zhou Y, Fan Y, Wang J, Liu W, Liu Y, Soon JB, Cai Y, Sun C.
    Micromachines (Basel); 2022 Nov 22; 13(12):. PubMed ID: 36557343
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  • 6. Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator.
    Gao C, Zou Y, Zhou J, Liu Y, Liu W, Cai Y, Sun C.
    Micromachines (Basel); 2022 Jan 08; 13(1):. PubMed ID: 35056267
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  • 8. Temperature Characteristics of a Contour Mode MEMS AlN Piezoelectric Ring Resonator on SOI Substrate.
    Fei S, Ren H.
    Micromachines (Basel); 2021 Jan 29; 12(2):. PubMed ID: 33572931
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  • 9. A MEMS Fabrication Process with Thermal-Oxide Releasing Barriers and Polysilicon Sacrificial Layers for AlN Lamb-Wave Resonators to Achieve fs·Qm > 3.42 × 1012.
    Zhao J, Zhu Z, Sun H, Lv S, Wang X, Song C.
    Micromachines (Basel); 2021 Jul 28; 12(8):. PubMed ID: 34442514
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  • 13. Ultra temperature-stable bulk-acoustic-wave resonators with SiO2 compensation layer.
    Yu H, Pang W, Zhang H, Kim ES.
    IEEE Trans Ultrason Ferroelectr Freq Control; 2007 Oct 28; 54(10):2102-9. PubMed ID: 18019248
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